Introduction to Microscale and Nanoscale Manufacturing Course

Program Overview

This program provides an overview of micromachining technologies and microelectromechanical systems (MEMS), covering methods of micromachining, production of MEMS devices, and design of microfabrication processes. The course includes lectures, discussions, and outside study, and is assessed through letter grading.

Program Outline

Outline:

Course Content:

• Introduction to micromachining technologies and microelectromechanical systems (MEMS)
• Methods of micromachining
• Production of MEMS, including microstructures, microsensors, and microactuators
• Design of microfabrication processes for MEMS devices

Course Structure:

• Lectures (4 hours)
• Discussion (1 hour)
• Outside study (7 hours)

Course Schedule:

• Concurrently scheduled with course CM280A

Individual Modules:

• No information provided in the context.

Assessment:

• Letter grading

Teaching:

• Instructor: Prof. Ju, Y-S.

Careers:

• No information provided in the context.