Program Overview

IH2659 Nanofabrication Technologies

The course IH2659 Nanofabrication Technologies is a 7.5 credit course that reviews the process technologies used to build integrated circuits. Students will learn basic and advanced techniques to define patterns, add and remove materials on substrates, covering both state-of-the-art high volume techniques and technologies used in R&D.

Course Contents

The course covers process technologies used in micro- and nanofabrication of devices and systems on wafers, including applications such as integrated circuits, micro-electro-mechanical systems, and optical devices. The basic unit processes of deposition, patterning, etching, doping, and heat treatment are covered, followed by process integration to build complex devices, including statistical process control and yield models. Moore's law and the basic economics for integrated circuits are also covered.

Intended Learning Outcomes

After the course, students should be able to:

• Discuss and review unit manufacturing processes for micro- and nanofabrication on wafers
• Discuss and review Moore's law and advanced process technologies
• Discuss and review examples of process integration
• Use models and calculate relevant characteristics and conditions in process technology
• Fabricate devices in a clean room

Literature and Preparations

Specific Prerequisites

• Knowledge in calculus in one variable, 7.5 credits
• Knowledge in classical physics, 7.5 credits
• Documented knowledge in English corresponding to the upper secondary course English B/English 6

Recommended Prerequisites

• Courses on BSc level or higher in solid-state physics and semiconductor devices

Literature

Information about course literature can be found in the course memo for the course offering or in the course room in Canvas.

Examination and Completion

Grading Scale

The grading scale for the course is A, B, C, D, E, FX, F.

Examination

The course examination consists of:

• LAB1 - Lab, 1.0 credits, grading scale: P, F
• TENS - Written exam, 2.5 credits, grading scale: A, B, C, D, E, FX, F
• TENM - Oral exam, 4.0 credits, grading scale: A, B, C, D, E, FX, F

Examiner

The examiner for the course is Per-Erik Hellström.

Ethical Approach

• All members of a group are responsible for the group's work.
• In any assessment, every student shall honestly disclose any help received and sources used.
• In an oral assessment, every student shall be able to present and answer questions about the entire assignment and solution.

Further Information

Course Room in Canvas

Registered students can find further information about the implementation of the course in the course room in Canvas.

Offered By

The course is offered by EECS/Electrical Engineering.

Main Field of Study

The main field of study for the course is Electrical Engineering.

Education Cycle

The course is part of the second cycle of education.

Supplementary Information

In this course, the EECS code of honor applies.