Program Overview

MEMS Theory and Applications

Course Description

This course is designed to teach students Micro-Electro-Mechanical Systems (MEMS) design, analysis and applications. The course focuses on advanced MEMS theory, design considerations, squeeze film damping, types of sensors and actuators, micro-resonators, gyroscopes and their applications, and economics of microfabrication.

Course Details

• Course period: 17/01/21
• Department: Mechanical & Nuclear Engineering

Course Overview

The course covers various aspects of MEMS, including:

• Advanced MEMS theory
• Design considerations
• Squeeze film damping
• Types of sensors and actuators
• Micro-resonators
• Gyroscopes and their applications
• Economics of microfabrication