Program Overview

Introduction to the Accelerated Cleanroom Training Program

The Accelerated Cleanroom Training Program (ACT) is an experiential program designed to introduce microfabrication and analysis concepts to interested undergraduate students, graduate students, and visiting scholars. The program is offered by the Center for Materials, Devices, and Integrated Systems, Micro and NanoFabrication Clean Room, to meet the growing demand for skilled engineers and scientists in cleanroom technologies.

Program Overview

The ACT program features extensive training in cleanroom safety and operations, followed by a hands-on laboratory experience and an optional short-term applied activity or project with a supervisor. Participants complete their full training in the Micro and Nanofabrication Cleanroom, a 10,000 square foot clean-room facility that enables the fabrication of nano-scale microelectronic devices and houses in-line characterization and metrology tools.

Program Modules

The program covers the following modules:

• Cleanroom Safety
• Lithography
• Deposition
• Etching
• Metrology
• Vacuum Technologies

Program Structure

This modular program is limited to 6 (min)-24 (max) participants and can be offered in six, four, or two weeks. Participants will receive pre-, during, and post-evaluation surveys to assess the baseline knowledge, monitor and adjust the instruction, and evaluate the learning outcomes.

Classroom Lectures and Hands-on Training

Classroom lectures cover the fundamental building blocks of major semiconductor processes. The hands-on training and practice component exposes participants to theoretical and practical approaches to fabrication in a cleanroom. Prior experience in a cleanroom environment is not a prerequisite.

Program Benefits

By completing this training program, participants gain the necessary skills and knowledge to contribute effectively to semiconductor manufacturing processes and have a fundamental understanding of metrology and characterization techniques. Participants also receive a certificate of completion.

Example Program

The example program includes:

1. Cleanroom introduction and safety training
2. Lithography: Spin Coating
3. Lithography: Optical Lithography
4. Lithography: Maskless / E-beam Lithography
5. Deposition: Chemical Vapor Deposition
6. Deposition: Plasma Vapor Deposition
7. Deposition: Atomic Layer Deposition
8. Etching: Wet Etching / Plasma / Physical Etching
9. Etching: Reactive Ion Etching
10. Metrology: Microscopy Techniques
11. Metrology: Contact/Non-Contact Techniques
12. Vacuum Science and Gas Delivery Systems

Conclusion

The Accelerated Cleanroom Training Program provides a comprehensive and hands-on experience for participants to gain the necessary skills and knowledge in cleanroom technologies, making them valuable assets to the semiconductor manufacturing industry.